Microfluidique et Microfabrication

Micro-hydrodynamics (CM 30h)

Hydrodynamics M.C. Jullien (15h)
• Navier-Stokes equation
• Low-Reynolds number hydrodynamics
• Modes of transport (diffusion, convection, electro-osmosis)
• Hydrodynamics phenomena at intermediate Reynolds numbers in microsystems (ex. Dean flows)Interfacial hydrodynamics and formulation N. Bremond (6h)
• Microfluidics and spray: hydrodynamics and applications
• Microfluidics and emulsion: hydrodynamics, physicochemistry and applications
Stokes flows in the lubrication approximation:

Fundamentals and application to micro and nanofluidics J. McGraw (9h)
• How does spin coating work ?
• Surface-tension-driven, thin-film flows
• Reynolds’ slipper bearing: lift and drag on a sliding plane
• Reynolds’ sphere: nanofluidics
• Elastohydrodynamics in microfluidics

Microfabrication (Cours / TD)
• Basics of silicon microfabrication : lithography, etching, thin-film deposition, mask alignments, etc.
• PDMS and NOA microfabrication
• Bio-MEMS : interfacing silicon with biology
• Flexible electronics : How to manufacture flexible, stretchable, self-healing electronic components using simple microfabrication techniques? How to power embedded sensors using the energy of mechanical
vibrations?
• Nanofabrication : E-beam lithography, nano-imprint
In addition to the lectures, labclasses are organized (16h) :
• CAD Design and lithography
• Single-phase (diffusion, gradients) and multiphase flows (droplet generation)